Open AccessReaction Process of Zirconium Tetrachloride with Ammonia in the Vapor Phase and Properties of the Zirconium Nitride Formed
Author(s) -
YajimaAkimasa,
SegawaYutaka,
MatsuzakiRyoko,
SaekiYuzo
Publication year - 1983
Publication title -
bulletin of the chemical society of japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.145
H-Index - 99
eISSN - 1348-0634
pISSN - 0009-2673
DOI - 10.1246/bcsj.56.2638
Subject(s) - chemistry , ammonia , stoichiometry , zirconium , inorganic chemistry , zirconium nitride , nitride , thermal decomposition , tetrachloride , decomposition , gas phase , nitrogen , organic chemistry , titanium nitride , layer (electronics) , tin