Open AccessA Clean Source of B atoms without Using Explosive Boron Compounds
Author(s) -
Hironobu Umemoto,
Atsushi Miyata
Publication year - 2016
Publication title -
bulletin of the chemical society of japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.145
H-Index - 99
eISSN - 1348-0634
pISSN - 0009-2673
DOI - 10.1246/bcsj.20160074
Subject(s) - chemistry , boron , explosive material , organic chemistry
Efficient sustained release of B atoms, sufficient for doping to semiconductor substrates, was achieved when W wires boronized by NH3BH3/H2 were heated in the presence of H2. The B-atom density in the gas phase was on the order of 1011 cm−3 and could be kept constant more than 240 min.
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