Open AccessFabrication of Tunable InP/Air-gap Fabry-Perot Cavities by Selective Etching of InGaAs Sacrificial Layers
Author(s) -
N. Chiţică,
J. Daleiden,
Jonas Bentell,
J. André,
M. Strassner,
Staffan Greek,
D. M. Pasquariello,
Mikael Karlsson,
Ram P. Gupta,
Klas Hjort
Publication year - 1999
Publication title -
physica scripta
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.415
H-Index - 83
eISSN - 1402-4896
pISSN - 0031-8949
DOI - 10.1238/physica.topical.079a00131
Subject(s) - materials science , fabrication , optoelectronics , surface micromachining , etching (microfabrication) , fabry–pérot interferometer , air gap (plumbing) , engraving , bulk micromachining , layer (electronics) , gallium arsenide , reactive ion etching , nanotechnology , composite material , medicine , wavelength , alternative medicine , pathology