Open AccessDesign of a microelectromechanical systems resonant electric field sensor with sensitivity robustness
Author(s) -
Heng Liu,
Jiaqi Xu,
Feng Xiong,
Rui-li Meng
Publication year - 2015
Publication title -
advances in mechanical engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.318
H-Index - 40
eISSN - 1687-8140
pISSN - 1687-8132
DOI - 10.1177/1687814015619829
Subject(s) - sensitivity (control systems) , control theory (sociology) , robustness (evolution) , voltage , electric field , electromagnetic shielding , electronic circuit , controller (irrigation) , physics , engineering , electronic engineering , computer science , electrical engineering , biochemistry , chemistry , control (management) , quantum mechanics , artificial intelligence , gene , agronomy , biology
Studies indicate that driving circuit and drift error in resonance frequency influence the sensitivity of micromechanical resonant electric field sensors. This study proposes an electric field sensor with a comb structure for driving and sensing. A dynamic model is built for the microsensor, which analyzes the behavior and sensitivity of the system on different closed-loop self-excited circuits using the averaging method. Theory and simulation results show that with the use of a proportional–integral controller, the sensitivity remains constant regardless of the variations in the resonance frequency of the shielding layer and Q-factor. The sensitivity is higher with a suitable proportional–integral controller than without a proportional–integral controller. If the parameters of the proportional–integral controller fail to satisfy the constraint relationship, output voltage becomes unstable, and the sensitivity is distorted
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