Open AccessEstablishment of a Near-Field Photolithography Processing Experiment Prediction Model and Parameter Optimization Model
Author(s) -
ZoneChing Lin,
ChingBeen Yang
Publication year - 2011
Publication title -
journal of computational and theoretical nanoscience
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.124
H-Index - 52
eISSN - 1546-1963
pISSN - 1546-1955
DOI - 10.1166/jctn.2011.1797
Subject(s) - photolithography , computer science , field (mathematics) , biological system , mathematics , nanotechnology , materials science , biology , pure mathematics
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