Open AccessHighly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System
Author(s) -
Krutideepa Bhol
Publication year - 2017
Publication title -
engineering and applied sciences
Language(s) - English
Resource type - Journals
eISSN - 2575-2022
pISSN - 2575-1468
DOI - 10.11648/j.eas.20170204.12
Subject(s) - multiphysics , capacitive sensing , microelectromechanical systems , capacitance , sensitivity (control systems) , pressure sensor , mechanical engineering , electronic engineering , fabrication , process (computing) , finite element method , engineering , electrical engineering , materials science , computer science , optoelectronics , physics , structural engineering , medicine , electrode , alternative medicine , quantum mechanics , pathology , operating system
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