An Inexpensive Diffusion Furnace
Author(s) -
M.R. Haskard,
JT Bannigan
Publication year - 1982
Publication title -
active and passive electronic components
Language(s) - English
Resource type - Journals
eISSN - 1026-7034
pISSN - 0882-7516
DOI - 10.1155/apec.9.217
Subject(s) - idle , diffusion , throughput , reading (process) , electrical engineering , mechanical engineering , engineering , process engineering , computer science , automotive engineering , environmental science , telecommunications , operating system , thermodynamics , physics , law , political science , wireless
The paper describes the design of a low cost diffusion furnace suitable for monolythic circuit manufacture in educational and other establishments, where throughput is small. Features include maximum temperature of 1300℃, direct reading set temperature dial, flat zone 55 mm and an idle temperature of 420℃ when the furnace is not in use.
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