Open AccessA Theory of Bubbles in Ion‐implanted Structures
Author(s) -
W. Kinsner
Publication year - 1981
Publication title -
active and passive electronic components
Language(s) - English
Resource type - Journals
eISSN - 1026-7034
pISSN - 0882-7516
DOI - 10.1155/apec.8.247
Subject(s) - bubble , ion implantation , ion , semiconductor , materials science , nanotechnology , optoelectronics , physics , mechanics , quantum mechanics
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