Open AccessModel for Describing Emission Characteristics of Electron‐BeamEvaporation Sources
Author(s) -
M. Szilágyi
Publication year - 1979
Publication title -
active and passive electronic components
Language(s) - English
Resource type - Journals
eISSN - 1026-7034
pISSN - 0882-7516
DOI - 10.1155/apec.6.9
Subject(s) - evaporation , cathode ray , electron , environmental science , beam (structure) , materials science , physics , atomic physics , optics , nuclear physics , meteorology
The experimental data for the anistropic component of the angular distribution of electron-beam evaporation sources are usually described in terms of the cos n θ dependence. In this paper a simple model for calculating angular distributions is presented. The generally used dependence appears as a particular case in the model.
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