Materials and Applications for Thin Films in Hybrid Microelectronics | Zendy

G. Zinsmeister | Zendy

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Materials and Applications for Thin Films in Hybrid Microelectronics

Author(s) -

G. Zinsmeister

Publication year - 1980

Publication title -

active and passive electronic components

Language(s) - English

Resource type - Journals

eISSN - 1026-7034

pISSN - 0882-7516

DOI - 10.1155/apec.6.209

Subject(s) - microelectronics , thin film , electronic circuit , planar , materials science , deposition (geology) , engineering physics , nanotechnology , computer science , optoelectronics , engineering , electrical engineering , geology , computer graphics (images) , paleontology , sediment

The use of thick films in microelectronics has increased in an impressive way during the last years. In contrast to this, thin films have shown a less spectacular but nevertheless steady evolution which concerned mainly more efficient deposition methods (planar magnetron) as well as higher quality films and thus better components and circuits. The present paper aims at illustrating this by some selected examples.

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