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New Thick Film Sensors
Author(s) -
S. Leppävuori
Publication year - 1980
Publication title -
active and passive electronic components
Language(s) - English
Resource type - Journals
eISSN - 1026-7034
pISSN - 0882-7516
DOI - 10.1155/apec.6.193
Subject(s) - microelectronics , capacitive sensing , resistive touchscreen , materials science , humidity , optoelectronics , stage (stratigraphy) , electro optical sensor , electrical engineering , nanotechnology , engineering , physics , geology , paleontology , thermodynamics
Various thick film sensors which are under development in the Microelectronics laboratory of the University of Oulu are described. More details are included on the capacitive thick film temperature sensor which is in the application stage. Other thick film sensors at present in the material development stage are the resistive humidity sensor, the gas sensor and the ion selective sensor.

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