Electrolytic Oxidation of Semiconductor Surfaces
Author(s) -
H.L. Hartnagel
Publication year - 1977
Publication title -
active and passive electronic components
Language(s) - English
Resource type - Journals
eISSN - 1026-7034
pISSN - 0882-7516
DOI - 10.1155/apec.3.225
Subject(s) - semiconductor , materials science , electrolyte , optoelectronics , chemistry , electrode
Recently a greater understanding of the physics and chemistry of anodic oxide growth on III-V compound semiconductors has become available. These details are reviewed and critically assessed. With the data avilable now new device applications can be considered.
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