The Determination of the Thickness of Anodic Al2O3 Film
Author(s) -
R. Van Schuur
Publication year - 1977
Publication title -
active and passive electronic components
Language(s) - English
Resource type - Journals
eISSN - 1026-7034
pISSN - 0882-7516
DOI - 10.1155/apec.3.203
Subject(s) - anodizing , ammonium hydroxide , electrolyte , annealing (glass) , materials science , aluminium , ethylene glycol , analytical chemistry (journal) , ellipsometry , aqueous solution , chemistry , composite material , inorganic chemistry , thin film , nanotechnology , chromatography , electrode , organic chemistry
To compare the properties of anodized aluminium oxide layers an easy thickness determination method is wanted. Crevecoeur and De Wit used a method expressing the thickness in terms of peak voltages obtained by forming again after annealing. The aim of the work described here is to relate the value of the peak voltage to the thickness of the layer measured by ellipsometry.
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