Open AccessNew Alumina Substrates for Microelectronics
Author(s) -
K. Niwa,
K. Murakawa
Publication year - 1975
Publication title -
active and passive electronic components
Language(s) - English
Resource type - Journals
eISSN - 1026-7034
pISSN - 0882-7516
DOI - 10.1155/apec.2.115
Subject(s) - smoothness , microelectronics , materials science , surface (topology) , surface finish , smooth surface , nanotechnology , chemical engineering , composite material , mathematics , geometry , mathematical analysis , engineering
Alumina substrates of Al 2 O 3 –MgO–Cr 2 O 3 give excellent surface smoothness. These were studied with respect to their green tapes, the surface finish of fired substrates, and in particular smoothness. The factors contributing to these characteristics were investigated, in particular the effect of the addition of Cr 2 O 3 on surface smoothness.
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom