Open AccessPorous Silicon Formation by Electrochemical Etching
Author(s) -
О. І. Кuntyi,
Galyna Zozulya,
Mariana Shepida
Publication year - 2022
Publication title -
advances in materials science and engineering
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.356
H-Index - 42
eISSN - 1687-8442
pISSN - 1687-8434
DOI - 10.1155/2022/1482877
Subject(s) - materials science , porous silicon , etching (microfabrication) , silicon , anode , chemical engineering , nucleation , anodizing , dissolution , microelectronics , nanotechnology , porosity , electrolyte , isotropic etching , layer (electronics) , composite material , metallurgy , electrode , organic chemistry , chemistry , aluminium , engineering
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