Spreadability of Ag Layer on Oxides and High Performance of AZO/Ag/AZO Sandwiched Transparent Conductive Film
Author(s) -
Yuchao Niu,
Xiaoyu Ma,
Xiangju Liu,
Weimin Wang,
Yongtai Zhen,
Ying Gao
Publication year - 2017
Publication title -
journal of nanoscience
Language(s) - English
Resource type - Journals
eISSN - 2356-749X
pISSN - 2314-6931
DOI - 10.1155/2017/2409062
Subject(s) - materials science , sheet resistance , indium tin oxide , transmittance , transparent conducting film , layer (electronics) , electrical conductor , substrate (aquarium) , composite material , sputter deposition , figure of merit , sputtering , optoelectronics , thin film , nanotechnology , oceanography , geology
Single layers of indium tin oxide (ITO), aluminum-doped zinc oxide (AZO), and Ag, bilayers of ITO/Ag and AZO/Ag, and sandwiched layers of ITO/Ag/ITO (IAI) and AZO/Ag/AZO (ZAZ) were fabricated on ordinary glass substrates using magnetron sputtering. The surface morphologies of single layers and bilayers were measured. The sheet resistance and transmittance of the sandwiched layers were investigated. The results showed that the spreadability of the Ag on the AZO was significantly better than that on the ITO or bare glass substrate. The spreadability of Ag on underlayers influences obviously the performance of transparent conductive oxide/Ag/transparent conductive oxides (TCO/Ag/TCO or TAT). The sheet resistance and transmittance of the ZAZ sandwiched layer with the matching of 35 nm AZO (35 nm)/Ag (9 nm)/AZO (35 nm) fabricated in this paper were low to 3.84 Ω/sq and up to 85.55% at 550 nm, respectively. Its maximum Haacke figure of merit was 0.05469 Ω−1, higher than that of IAI multilayer
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