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Full Aperture CO2Laser Process to Improve Laser Damage Resistance of Fused Silica Optical Surface
Author(s) -
Wei Liao,
Chuanchao Zhang,
Sun Xiaofen,
Lijuan Zhang,
Xiaodong Yuan
Publication year - 2014
Publication title -
advances in condensed matter physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.314
H-Index - 26
eISSN - 1687-8124
pISSN - 1687-8108
DOI - 10.1155/2014/676108
Subject(s) - galvanometer , materials science , laser , optics , aperture (computer memory) , surface (topology) , power (physics) , acoustics , physics , geometry , mathematics , quantum mechanics
An improved method is presented to scan the full-aperture optical surface rapidly by using galvanometer steering mirrors. In contrast to the previous studies, the scanning velocity is faster by several orders of magnitude. The velocity is chosen to allow little thermodeposition thus providing small and uniform residual stress. An appropriate power density is set to obtain a lower processing temperature. The proper parameters can help to prevent optical surface from fracturing during operation at high laser flux. S-on-1 damage test results show that the damage threshold of scanned area is approximately 40% higher than that of untreated area

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