An Electrostatically Actuated MEMS Arch Band-Pass Filter | Zendy

Hassen M. Ouakad | Zendy

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An Electrostatically Actuated MEMS Arch Band-Pass Filter

Author(s) -

Hassen M. Ouakad

Publication year - 2013

Publication title -

shock and vibration

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.418

H-Index - 45

eISSN - 1875-9203

pISSN - 1070-9622

DOI - 10.1155/2013/819398

Subject(s) - arch , microelectromechanical systems , galerkin method , band pass filter , resonator , harmonic , acoustics , filter (signal processing) , control theory (sociology) , engineering , materials science , physics , structural engineering , electronic engineering , computer science , finite element method , optoelectronics , electrical engineering , control (management) , artificial intelligence

This work presents an investigation of the dynamics of micromachined arches resonators and their potential to be utilized as band-pass filters. The arches are actuated by a DC electrostatic load superimposed to an AC harmonic load. The dynamic response of the arch is studied analytically using a Galerkin-based reduced-order model when excited near its fundamental and third natural frequencies. Several simulation results are presented demonstrating interesting jumps and snap-through behavior of the arches and their attractive features for uses as band-pass filters, such as their sharp roll-off from pass bands to stop bands and their flat response.

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