Properties of TiC Coating by Pulsed DC PACVD | Zendy

Mahboobeh Azadi | Zendy; A. Sabour Rouhaghdam | Zendy; Shahrokh Ahangarani | Zendy

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Properties of TiC Coating by Pulsed DC PACVD

Author(s) -

Mahboobeh Azadi,

A. Sabour Rouhaghdam,

Shahrokh Ahangarani

Publication year - 2013

Publication title -

journal of coatings

Language(s) - English

Resource type - Journals

eISSN - 2356-7236

pISSN - 2314-6508

DOI - 10.1155/2013/712812

Subject(s) - materials science , knoop hardness test , coating , indentation hardness , surface roughness , composite material , chemical vapor deposition , indentation , fourier transform infrared spectroscopy , surface finish , diffraction , metallurgy , microstructure , chemical engineering , optics , nanotechnology , physics , engineering

In the PACVD technique, temperature and gas flow rate are two important parameters affecting the coating characteristics. Effect of these parameters on mechanical behaviors of TiC coating that was deposited on hot work tool steel (H13) was investigated in this paper. We analyzed TiC coating composition and structure with grazing incidence X-ray diffraction (GIXRD) and Fourier transformation infrared spectroscopy (FTIR). The mechanical properties of the coatings, such as microhardness, wear resistance, and surface roughness, were studied with Knoop hardness indentation, pin on disk wear tests, and atomic force microscopy, respectively. When the deposition temperature decreased from 490°C to 450°C and the CH4 to TiCl4 flow rate ratio was also increased from 1.5 to 6, TiC coating color changed from dark gray to silver. The best mechanical properties such as a high hardness (27 GPa), wear resistance, and low surface roughness were related to the coating that was deposited at 450°C

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