Wideband Lithium Niobate FBAR Filters | Zendy

Thomas Baron | Zendy; Éric Lebrasseur | Zendy; Florent Bassignot | Zendy; Haixia Wang | Zendy; Sylvain Ballandras | Zendy; Ji Fan | Zendy; Lise Catherinot | Zendy; Matthieu Chatras | Zendy; P. Monfraix | Zendy; Laetitia Estagerie | Zendy

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Wideband Lithium Niobate FBAR Filters

Author(s) -

Thomas Baron,

Éric Lebrasseur,

Florent Bassignot,

Haixia Wang,

Sylvain Ballandras,

Ji Fan,

Lise Catherinot,

Matthieu Chatras,

P. Monfraix,

Laetitia Estagerie

Publication year - 2013

Publication title -

international journal of microwave science and technology

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.125

H-Index - 11

eISSN - 1687-5834

pISSN - 1687-5826

DOI - 10.1155/2013/459767

Subject(s) - materials science , fabrication , wideband , bandwidth (computing) , lapping , resonator , piezoelectricity , optoelectronics , lithium niobate , polishing , electromechanical coupling coefficient , electronic engineering , acoustics , computer science , engineering , telecommunications , medicine , alternative medicine , pathology , composite material , physics

International audienceFilters based on film bulk acoustic resonators (FBARs) are widely used for mobile phone applications, but they can also address wideband aerospace requirements. These devices need high electromechanical coupling coefficients to achieve large band pass filters.The piezoelectric material LiNbO3 complies with such specifications and is compatible with standard fabrication processes. In this work, simple metal--LiNbO3--metal structures have been developed to fabricate single FBAR elements directly connected to each other on a single chip. A fabrication process based on LiNbO3/silicon Au-Au bonding and LiNbO3 lapping/polishing has been developed and is proposed in this paper. Electrical measurements of these FBAR filters are proposed and commented exhibiting filters with 8% of fractional bandwidth and 3.3 dB of insertion losses. Electrical measurements show possibilities to obtain 14% of fractional bandwidth. These devices have been packaged, allowing for power handling, thermal, and ferroelectric tests, corresponding to spatial conditions

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