Micro/Nanostructured Arrays: Fabrication, Applications, and Devices | Zendy

Yue Li | Zendy; Bingqiang Cao | Zendy; Fengqiang Sun | Zendy; Sung Oh Cho | Zendy

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Micro/Nanostructured Arrays: Fabrication, Applications, and Devices

Author(s) -

Yue Li,

Bingqiang Cao,

Fengqiang Sun,

Sung Oh Cho

Publication year - 2013

Publication title -

journal of nanomaterials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.463

H-Index - 66

eISSN - 1687-4129

pISSN - 1687-4110

DOI - 10.1155/2013/306479

Subject(s) - materials science , lithography , photolithography , nanotechnology , computational lithography , fabrication , electron beam lithography , next generation lithography , x ray lithography , maskless lithography , microfluidics , stencil lithography , extreme ultraviolet lithography , resist , optoelectronics , layer (electronics) , medicine , alternative medicine , pathology

1 Institute of Solid State Physics, Chinese Academy of Sciences, Hefei, Anhui 230031, China 2 School of Materials Science and Engineering, University of Jinan, Jinan, Shandong 250022, China 3Department of Material Science and Engineering, South China Normal University, Guangzhou, Guangdong 510631, China 4Department of Nuclear and Quantum Engineering, Korea Advanced Institute of Science and Technology (KAIST), 373-1 Guseong-dong, Yuseong-gu, Daejeon 305-701, Republic of Korea

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