Cantilever Beam Metal-Contact MEMS Switch | Zendy

Adel Saad Emhemmed | Zendy; Abdulmagid A. Aburwein | Zendy

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Cantilever Beam Metal-Contact MEMS Switch

Author(s) -

Adel Saad Emhemmed,

Abdulmagid A. Aburwein

Publication year - 2013

Publication title -

conference papers in engineering

Language(s) - English

Resource type - Journals

eISSN - 2314-5838

pISSN - 2314-5366

DOI - 10.1155/2013/265709

Subject(s) - stiction , cantilever , microelectromechanical systems , materials science , beam (structure) , spring (device) , substrate (aquarium) , voltage , optoelectronics , electrical engineering , structural engineering , composite material , engineering , oceanography , geology

We present a new design of a miniature RF microelectromechanical system (MEMS) metal-contact switch and investigate various aspects associated with lowering the pull-down voltage and overcoming the stiction problem. Lowering the pull-down voltage in this design is based on reducing the spring constant by changing the cantilever beam geometry of the RF MEMS switch, and the stiction problem is overcome by a simple integrated method using two tiny posts located on the substrate at the free end of the cantilever beam.

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