Reactive Pulsed Laser Deposition of Titanium Nitride Thin Films: Effect of Reactive Gas Pressure on the Structure, Composition, and Properties | Zendy

R. Krishnan | Zendy; C. David | Zendy; P.K. Ajikumar | Zendy; R. Nithya | Zendy; S. Tripura Sundari | Zendy; S. Dash | Zendy; B. K. Panigrahi | Zendy; M. Kamruddin | Zendy; A.K. Tyagi | Zendy; Vikram Jayaram | Zendy; Baldev Raj | Zendy

Open Access

Reactive Pulsed Laser Deposition of Titanium Nitride Thin Films: Effect of Reactive Gas Pressure on the Structure, Composition, and Properties

Author(s) -

R. Krishnan,

C. David,

P.K. Ajikumar,

R. Nithya,

S. Tripura Sundari,

S. Dash,

B. K. Panigrahi,

M. Kamruddin,

A.K. Tyagi,

Vikram Jayaram,

Baldev Raj

Publication year - 2013

Publication title -

journal of materials

Language(s) - English

Resource type - Journals

eISSN - 2314-4874

pISSN - 2314-4866

DOI - 10.1155/2013/128986

Subject(s) - materials science , tin , titanium nitride , nanocrystalline material , thin film , analytical chemistry (journal) , crystallite , titanium , nitride , deposition (geology) , ellipsometry , pulsed laser deposition , nitriding , stoichiometry , metallurgy , composite material , layer (electronics) , nanotechnology , chemistry , paleontology , organic chemistry , chromatography , sediment , biology

Titanium nitride (TiN) thin films were deposited by reactive pulsed laser deposition (RPLD) technique. For the first time, the composition evaluated from proton elastic backscattering spectrometry, in a quantitative manner, revealed a dependence on the partial pressure of nitrogen from 1 to 10 Pa. Grazing incidence-XRD (GI-XRD) confirmed the formation of predominantly nanocrystalline TiN phase with a crystallite size of around 30 nm. The hardness showed maximum value of ~30 GPa when the composition is near stoichiometric and the friction coefficient was found to be as low as 0.3. In addition, a systematic optical response was observed as a function of deposition pressure from the surface of the TiN films using spectroscopic ellipsometry

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