Open AccessAn Astigmatic Detection System for Polymeric Cantilever-Based Sensors
Author(s) -
EnTe Hwu,
Hsien-Shun Liao,
Filippo Bosco,
Ching-Hsiu Chen,
Stephan Sylvest Keller,
Anja Boisen,
KuangYuh Huang
Publication year - 2011
Publication title -
journal of sensors
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.399
H-Index - 43
eISSN - 1687-7268
pISSN - 1687-725X
DOI - 10.1155/2012/580939
Subject(s) - cantilever , full width at half maximum , materials science , amplitude , optics , bandwidth (computing) , vibration , resolution (logic) , laser , signal (programming language) , excitation , resonance (particle physics) , optoelectronics , acoustics , physics , computer science , engineering , electrical engineering , telecommunications , artificial intelligence , composite material , programming language , particle physics
We demonstrate the use of an astigmatic detection system (ADS) for resonance frequency identification of polymer microcantilever sensors. The ADS technology is based on a DVD optical head combined with an optical microscope (OM). The optical head has a signal bandwidth of 80 MHz, allowing thermal fluctuation measurements on cantilever beams with a subnanometer resolution. Furthermore, an external excitation can intensify the resonance amplitude, enhancing the signal- to-noise ratio. The full width at half maximum (FWHM) of the laser spot is 568 nm, which facilitates read-out on potentially submicrometer-sized cantilevers. The resonant frequency of SU-8 microcantilevers is measured by both thermal fluctuation and excited vibration measurement modes of the ADS
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom