Silicon Oxynitride Optical Waveguide Ring Resonator Utilizing a Two-Mode Interferometer Structure | Zendy

Kaixin Chen | Zendy; Hau Ping Chan | Zendy

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Silicon Oxynitride Optical Waveguide Ring Resonator Utilizing a Two-Mode Interferometer Structure

Author(s) -

Kaixin Chen,

Hau Ping Chan

Publication year - 2011

Publication title -

international journal of photoenergy

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.426

H-Index - 51

eISSN - 1687-529X

pISSN - 1110-662X

DOI - 10.1155/2012/496267

Subject(s) - resonator , materials science , extinction ratio , waveguide , silicon , interferometry , silicon oxynitride , analytical chemistry (journal) , optics , silicon nitride , optoelectronics , physics , chemistry , wavelength , chromatography

Silicon oxynitride (SiOxNy, SiON) optical waveguide ring resonator, in which a two-mode interferometer is used to replace the directional coupler in a conventional ring resonator, has been designed and fabricated. Preliminary results exhibit the same of free spectral range of 100 GHz but different quality factors of 3700 and 3900 at 1550 nm for transverse electric (TE) and transverse magnetic (TM) mode, respectively. The extinction ratio is more than 18 dB over the entire C-band, and the insertion loss is lower than 9.5 dB for TE and TM mode

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