Open AccessA 3 DOF Model for an Electromagnetic Air Mount
Author(s) -
HyungTae Kim,
CheolHo Kim,
Sungbok Kang,
Kangwon Lee,
Jaeho Baek,
HyunHee Han
Publication year - 2012
Publication title -
advances in acoustics and vibration
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.237
H-Index - 14
eISSN - 1687-627X
pISSN - 1687-6261
DOI - 10.1155/2012/218429
Subject(s) - electromagnet , isolator , engineering , vibration isolation , position (finance) , matrix (chemical analysis) , air gap (plumbing) , vibration , control theory (sociology) , mechanical engineering , acoustics , magnet , physics , electronic engineering , computer science , materials science , control (management) , finance , economics , composite material , artificial intelligence
A 4×4 matrix model with three degrees of freedomis proposed as a means for controlling microvibrations andapplied to an electromagnetic isolator. The model was derivedfrom an assumption based on small- and low-frequency vibrations. The coordinates of the 3 DOF was composed of the 4 variables,representing a vertical position, pitch, roll, and a proof term. The coordinates were calculated from the 4 position sensorsin the isolator and formulated into a 4×4 matrix, whichpossesses inversive full rank. The electro-magnetic isolator wasbuilt for a simulated machine in semiconductor manufacturingand consisted of a heavy surface plate, sensors, amps, a controller,and air springs with electromagnets. The electromagnets areinstalled in a pneumatic chamber of the individual air spring. The performance of the 3 DOF model was experimented andcompared with that of a 1 DOF model in an impact test. Thesettling time in the result was reduced to 25%
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