High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument withIn SituAFM | Zendy

J. A. Whitby | Zendy; Fredrik Östlund | Zendy; Péter Horváth | Zendy; Mihai Gabureac | Zendy; Jessica L. Riesterer | Zendy; Ivo Utke | Zendy; M. Hohl | Zendy; Libor Sedláček | Zendy; Jaroslav Jiruše | Zendy; Vinzenz Friedli | Zendy; Mikhaël Bechelany | Zendy; Johann Michler | Zendy

Open Access

High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument withIn SituAFM

Author(s) -

J. A. Whitby,

Fredrik Östlund,

Péter Horváth,

Mihai Gabureac,

Jessica L. Riesterer,

Ivo Utke,

M. Hohl,

Libor Sedláček,

Jaroslav Jiruše,

Vinzenz Friedli,

Mikhaël Bechelany,

Johann Michler

Publication year - 2011

Publication title -

advances in materials science and engineering

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.356

H-Index - 42

eISSN - 1687-8442

pISSN - 1687-8434

DOI - 10.1155/2012/180437

Subject(s) - secondary ion mass spectrometry , materials science , focused ion beam , mass spectrometry , ion source , microscope , time of flight , analytical chemistry (journal) , resolution (logic) , field ion microscope , ion beam , scanning probe microscopy , optics , ion , optoelectronics , beam (structure) , chemistry , physics , chromatography , artificial intelligence , computer science , organic chemistry

We describe the design and performance of an orthogonal time-of-flight (TOF) secondary ion mass spectrometer that can be retrofitted to existing focused ion beam (FIB) instruments. In particular, a simple interface has been developed for FIB/SEM instruments from the manufacturer Tescan. Orthogonal extraction to the mass analyser obviates the need to pulse the primary ion beam and does not require the use of monoisotopic gallium to preserve mass resolution. The high-duty cycle and reasonable collection efficiency of the new instrument combined with the high spatial resolution of a gallium liquid metal ion source allow chemical observation of features smaller than 50 nm. We have also demonstrated the integration of a scanning probe microscope (SPM) operated as an atomic force microscope (AFM) within the FIB/SEM-SIMS chamber. This provides roughness information, and will also allow true three dimensional chemical images to be reconstructed from SIMS measurements.

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