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ZnO nanowires have received much interest owing to their particular structural and piezoelectric properties. For widespread application of ZnO nanowires in various nanotechnologies, the mechanical reliability of the nanowires should be assessed. In this paper, the damage characteristics of vertically grown ZnO nanowires due to contact sliding against a 2 mm diameter steel ball under relatively low loads were investigated. Frictional behavior and wear characteristics of the specimens were assessed. Furthermore, contact sliding tests were performed inside an SEM to monitor the progression of damage of the nanowires. It was found that the friction coefficient was about 0.35 under all loads while the damage characteristics of the nanowires were quite different for each load. The large diameter nanowires tended to fracture earlier than the small diameter nanowires. Wear tests performed inside the SEM confirmed the surface damage characteristics observed during the friction tests

Characteristics of Progressive Damage of ZnO Nanowires during Contact Sliding under Relatively Low Loads