Open AccessStructural and Mechanical Properties of CrNxCoatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance
Author(s) -
Can Xin Tian,
Bing Yang,
Jun He,
Hong Jun Wang,
De Fu
Publication year - 2010
Publication title -
journal of nanomaterials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.463
H-Index - 66
eISSN - 1687-4129
pISSN - 1687-4110
DOI - 10.1155/2011/534647
Subject(s) - materials science , sputter deposition , sputtering , scanning electron microscope , substrate (aquarium) , ion , analytical chemistry (journal) , transmission electron microscopy , indentation hardness , tribology , cavity magnetron , diffraction , composite material , thin film , nanotechnology , optics , microstructure , physics , chemistry , oceanography , chromatography , quantum mechanics , geology
CrNx coatings were deposited on Si (100) and WC-Co substrates by a home-made medium-frequency magnetron sputtering system with and without thermal filament ion source assistance. The structure and composition of the coatings were characterized by X-ray diffraction, atomic force microscopy, scanning electron microscopy, and transmission electron microscopy. The mechanical and tribological properties were assessed by microhardness and pin-on-disc testing. The ion source-assisted system showed a deposition rate of 3.88 μm/h, much higher than the value 2.2 μm/h without ion source assistance. The CrNx coatings prepared with ion source assistance exhibited an increase in microhardness (up to 16.3 GPa) and adecrease in friction coefficient (down to 0.48) at the optimized cathode source-to-substrate distance
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