On Mass Loading and Dissipation Measured with Acoustic Wave Sensors: A Review | Zendy

Marina Voinova | Zendy

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On Mass Loading and Dissipation Measured with Acoustic Wave Sensors: A Review

Author(s) -

Marina Voinova

Publication year - 2009

Publication title -

journal of sensors

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.399

H-Index - 43

eISSN - 1687-7268

pISSN - 1687-725X

DOI - 10.1155/2009/943125

Subject(s) - quartz crystal microbalance , dissipation , resonator , surface acoustic wave , materials science , acoustics , viscosity , surface acoustic wave sensor , acoustic wave , quartz , composite material , optoelectronics , physics , chemistry , thermodynamics , organic chemistry , adsorption

We summarize current trends in the analysis of physical properties (surface mass density, viscosity, elasticity, friction, and charge) of various thin films measured with a solid-state sensor oscillating in a gaseous or liquid environment. We cover three different types of mechanically oscillating sensors: the quartz crystal microbalance with dissipation (QCM-D) monitoring, surface acoustic wave (SAW), resonators and magnetoelastic sensors (MESs). The fourth class of novel acoustic wave (AW) mass sensors, namely thin-film bulk acoustic resonators (TFBARs) on vibrating membranes is discussed in brief. The paper contains a survey of theoretical results and practical applications of the sensors and includes a comprehensive bibliography

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