Growth of Pd-Filled Carbon Nanotubes on the Tip of Scanning Probe Microscopy | Zendy

T. Sakamoto | Zendy; Chien-Chao Chiu | Zendy; Kei Tanaka | Zendy; Masamichi Yoshimura | Zendy; Kazuyuki Ueda | Zendy

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Growth of Pd-Filled Carbon Nanotubes on the Tip of Scanning Probe Microscopy

Author(s) -

T. Sakamoto,

Chien-Chao Chiu,

Kei Tanaka,

Masamichi Yoshimura,

Kazuyuki Ueda

Publication year - 2009

Publication title -

journal of nanomaterials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.463

H-Index - 66

eISSN - 1687-4129

pISSN - 1687-4110

DOI - 10.1155/2009/851290

Subject(s) - materials science , scanning electron microscope , transmission electron microscopy , carbon nanotube , substrate (aquarium) , chemical vapor deposition , analytical chemistry (journal) , thin film , layer (electronics) , microscopy , nanotechnology , chemical engineering , composite material , optics , chromatography , chemistry , engineering , oceanography , physics , geology

We have synthesized Pd-filled carbon nanotubes (CNTs) oriented perpendicular to Si substrates using a microwave plasma-enhanced chemical vapor deposition (MPECVD) for the application of scanning probe microscopy (SPM) tip. Prior to the CVD growth, Al thin film (10 nm) was coated on the substrate as a buffer layer followed by depositing a 5∼40 nm-thick Pd film as a catalyst. The diameter and areal density of CNTs grown depend largely on the initial Pd thickness. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) images clearly show that Pd is successfully encapsulated into the CNTs, probably leading to higher conductivity. Using optimum growth conditions, Pd-filled CNTs are successfully grown on the apex of the conventional SPM cantilever

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