Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection | Zendy

Xinxin Li | Zendy; Haitao Yu | Zendy; Xiaohua Gan | Zendy; Xiaoyuan Xia | Zendy; Pengcheng Xu | Zendy; Jungang Li | Zendy; Min Liu | Zendy; Yongxiang Li | Zendy

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Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection

Author(s) -

Xinxin Li,

Haitao Yu,

Xiaohua Gan,

Xiaoyuan Xia,

Pengcheng Xu,

Jungang Li,

Min Liu,

Yongxiang Li

Publication year - 2009

Publication title -

journal of sensors

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.399

H-Index - 43

eISSN - 1687-7268

pISSN - 1687-725X

DOI - 10.1155/2009/637874

Subject(s) - cantilever , nanoelectromechanical systems , microelectromechanical systems , nanotechnology , surface micromachining , materials science , monolayer , sensitivity (control systems) , resolution (logic) , optoelectronics , electronic engineering , computer science , engineering , nanomedicine , nanoparticle , composite material , medicine , alternative medicine , pathology , fabrication , artificial intelligence

The paper reviews the recent researches implemented in Chinese Academy of Sciences, with achievements on integrated resonant microcantilever sensors. In the resonant cantilevers, the self-sensing elements and resonance exciting elements are both top-down integrated with silicon micromachining techniques. Quite a lot of effort is focused on optimization of the resonance mode and sensing structure for improvement of sensitivity. On the other hand, to enable the micro-cantilevers specifically sensitive to bio/chemical molecules, sensing materials are developed and modified on the cantilever surface with a self-assembled monolayer (SAM) based bottom-up construction and surface functionalization. To improve the selectivity of the sensors and depress environmental noise, multiple and localized surface modifications are developed. The achieved volume production capability and satisfactory detecting resolution to trace-level biological antigen of alpha-fetoprotein (AFP) give the micro-cantilever sensors a great promise for rapid and high-resoluble detection

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