Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing | Zendy

Mona Mayeh | Zendy; Jaime Viegas | Zendy; P. Srinivasan | Zendy; P. V. S. Marques | Zendy; J. L. Santos | Zendy; Eric G. Johnson | Zendy; Faramarz Farahi | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing

Author(s) -

Mona Mayeh,

Jaime Viegas,

P. Srinivasan,

P. V. S. Marques,

J. L. Santos,

Eric G. Johnson,

Faramarz Farahi

Publication year - 2009

Publication title -

journal of sensors

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.399

H-Index - 43

eISSN - 1687-7268

pISSN - 1687-725X

DOI - 10.1155/2009/470175

Subject(s) - multi mode optical fiber , fabrication , silicon oxynitride , refractive index , materials science , interference (communication) , optoelectronics , sensitivity (control systems) , silicon , nanotechnology , optical fiber , electronic engineering , computer science , silicon nitride , engineering , telecommunications , medicine , channel (broadcasting) , alternative medicine , pathology

We present optical sensors based on slotted multimode interference waveguides. The sensor can be tuned to highest sensitivity in the refractive index ranges necessary to detect protein-based molecules or other water-soluble chemical or biological materials. The material of choice is low-loss silicon oxynitride (SiON) which is highly stable to the reactivity with biological agents and processing chemicals. Sensors made with this technology are suited to high volume manufacturing

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research