The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators | Zendy

Ming-Hung Hsu | Zendy

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The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators

Author(s) -

Ming-Hung Hsu

Publication year - 2008

Publication title -

active and passive electronic components

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.144

H-Index - 22

eISSN - 1026-7034

pISSN - 0882-7516

DOI - 10.1155/2008/905628

Subject(s) - nonlinear system , residual stress , actuator , quadrature (astronomy) , residual , electrostatics , work (physics) , control theory (sociology) , differential equation , materials science , mechanics , nyström method , mathematical analysis , mechanical engineering , computer science , mathematics , algorithm , physics , engineering , chemistry , composite material , electronic engineering , artificial intelligence , integral equation , control (management) , quantum mechanics

This work simulates the nonlinear electromechanical behavior of different electrostatic microactuators. It applies the differential quadrature method, Hamilton's principle, and Wilson-θ integration method to derive the equations of motion of electrostatic microactuators and find a solution to these equations. Nonlinear equation difficulties are overcome by using the differential quadrature method. The stresses of electrostatic actuators are determined, and the residual stress effects of electrostatic microactuators are simulated

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