Collimated Magnetron Sputter Deposition for Mirror Coatings | Zendy

Anette Vickery | Zendy; Carsten P. Jensen | Zendy; Finn E. Christensen | Zendy; Mads Peter Steenstrup | Zendy; Troels Schønfeldt | Zendy

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Collimated Magnetron Sputter Deposition for Mirror Coatings

Author(s) -

Anette Vickery,

Carsten P. Jensen,

Finn E. Christensen,

Mads Peter Steenstrup,

Troels Schønfeldt

Publication year - 2008

Publication title -

x-ray optics and instrumentation

Language(s) - English

Resource type - Journals

eISSN - 1687-7640

pISSN - 1687-7632

DOI - 10.1155/2008/792540

Subject(s) - collimated light , sputter deposition , cavity magnetron , materials science , deposition (geology) , high power impulse magnetron sputtering , optoelectronics , optics , sputtering , thin film , nanotechnology , physics , geology , laser , paleontology , sediment

At the Danish National Space Center (DNSC), a planar magnetron sputtering chamber has been established as a research and production coating facility for curved X-ray mirrors for hard X-ray optics for astronomical X-ray telescopes. In the following, we present experimental evidence that a collimation of the sputtered particles is an efficient way to suppress the interfacial roughness of the produced multilayer. We present two different types of collimation optimized for the production of low roughness curved mirrors and flat mirrors, respectively

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