Computation of Conductance and Capacitance for IC Interconnects on a General Lossy Multilayer Substrate

In this paper a simple method for analysis and modelling of transmission interconnect lineson general lossy multilayer substrates at high bit rates is presented. The analysis is basedon semi-analytical Green's function approach and recurrence relation between thecoefficients of potential in n and n + 1 layers, respectively. The electromagnetic concept offree charge density is applied. It allows us to obtain integral equations between electricscalar potential and charge density distributions. These equations are solved by theGalerkin procedure of the Method of Moments. New approach is especially adequate tomodel 2-D layered structures with planar boundaries for frequencies up to 20GHz(quasistationary field approach). The transmission line parameters (capacitance andconductance per unit length) for the given interconnect multilayer geometry are computed.A discussion of the calculated line admittance in terms of technological and geometricalparameters of the structure is given. A comparison of the numerical results from thenew procedure with the techniques presented in the previous publications are provided,too