Open AccessEvaporation of Adherent Al-Films on Single Crystalline LiNbO3Substrates
Author(s) -
E. Schippel
Publication year - 1992
Publication title -
active and passive electronic components
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.144
H-Index - 22
eISSN - 1026-7034
pISSN - 0882-7516
DOI - 10.1155/1992/20790
Subject(s) - wafer , adhesion , substrate (aquarium) , materials science , evaporation , vacuum evaporation , composite material , ultrasonic sensor , optoelectronics , surface acoustic wave , thin film , optics , nanotechnology , acoustics , oceanography , physics , thermodynamics , geology
LiNbO3 is used as a single crystalline substrate material for the manufacturing of surface acoustic wavedevices as frequency selective components. On the polished substrate wafer, Al with a film thicknessof about 400 nm is evaporated in a high vacuum
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