Thin Metal Film Sensors | Zendy

C. R. Tellier | Zendy

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Thin Metal Film Sensors

Author(s) -

C. R. Tellier

Publication year - 1984

Publication title -

active and passive electronic components

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.144

H-Index - 22

eISSN - 1026-7034

pISSN - 0882-7516

DOI - 10.1155/1985/17659

Subject(s) - electromigration , thin film , grain boundary , materials science , grain size , grain boundary diffusion coefficient , electrical resistivity and conductivity , metal , thermal , diffusion , composite material , metallurgy , nanotechnology , electrical engineering , engineering , microstructure , physics , meteorology , thermodynamics

During the last decade some progress have been made in the field of sensors using thin film techniques.In particular thin metal film strain gauges and thin film temperature sensors based on the temperaturedependent resistivity of metal are now commonly used. But changes in other transport parameters withvarious measurands are also useful for the design of metal film sensors. Difficulty arises in thin filmtechniques when structural defects are frozen in films

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