Open AccessDopant-Free CMOS on SOI: Multi-Gate Si-Nanowire Transistors for Logic and Memory Applications
Author(s) -
Udo Schwalke,
Tillmann Krauss,
Frank Wessely
Publication year - 2013
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2013-01/21/897
Subject(s) - silicon on insulator , cmos , materials science , nanowire , dopant , optoelectronics , transistor , logic gate , electronic engineering , electrical engineering , doping , silicon , engineering , voltage
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