Open AccessTurning an SOI Into MEMS Devices for Optics and RF
Author(s) -
Hiroshi Toshiyoshi
Publication year - 2013
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2013-01/21/878
Subject(s) - microelectromechanical systems , silicon on insulator , optics , physics , optoelectronics , engineering , computer science , electrical engineering , silicon
not Available.
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