Open AccessFormation of Large Grain SiGe on Insulator by Si Segregation in Seedless-Rapid-Melting Process
Author(s) -
Ryusuke Kato,
Masashi Kurosawa,
Ryo Matsumura,
Taizoh Sadoh,
Masanobu Miyao
Publication year - 2012
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2012-02/43/3149
Subject(s) - materials science , process (computing) , melting temperature , insulator (electricity) , engineering physics , optoelectronics , composite material , computer science , physics , operating system
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