Open AccessHigh Resolution Double-Crystal X-ray Diffraction Imaging for Interfacial Defect Detection in Bonded Wafers.
Author(s) -
Saurabh Sharma,
Mark S. Goorsky
Publication year - 2012
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2012-02/40/2986
Subject(s) - wafer , materials science , resolution (logic) , diffraction , optics , crystal (programming language) , x ray , diffraction topography , x ray crystallography , crystallography , optoelectronics , chemistry , physics , computer science , programming language , artificial intelligence
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