Open AccessStudies of Boron Diffusivities on (001) and (110) Substrate Orientation in Si and Ge along Vertical/Out-Of Plane and Lateral/In-Plane Directions by SIMS and C-V Measurement on the Designed Test Pattern
Author(s) -
M.-H. Liao,
ChenHsin Chen,
L. Chang,
ChangHao Yang,
Cho-Fan Hsieh,
M. H. Lee
Publication year - 2012
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2012-02/3/271
Subject(s) - orientation (vector space) , materials science , substrate (aquarium) , plane (geometry) , boron , geometry , geology , chemistry , oceanography , mathematics , organic chemistry
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