Open AccessHeterepitaxial Growth of High Quality Germanium Layer on Si(001) in RPCVD for GOI Fabrication
Author(s) -
Jiantao Bian,
Zhongying Xue,
Da Chen,
Zengfeng Di,
Miao Zhang
Publication year - 2012
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2012-01/20/877
Subject(s) - germanium , fabrication , layer (electronics) , materials science , quality (philosophy) , optoelectronics , nanotechnology , silicon , medicine , physics , pathology , quantum mechanics , alternative medicine
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