Open AccessSub-100nm Non-Planar 3D InGaAs MOSFETs: Fabrication and Characterization
Author(s) -
Jiangjiang Gu,
Peide D. Ye
Publication year - 2012
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2012-01/17/784
Subject(s) - fabrication , characterization (materials science) , materials science , planar , optoelectronics , nanotechnology , computer science , medicine , alternative medicine , computer graphics (images) , pathology
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