Open AccessDesorption of Ge Species during Thermal Oxidation of Ge and Annealing of HfO2/GeO2 Stacks
Author(s) -
C. Radtke,
Guilherme Koszeniewski Rolim,
Samoel R.M. Da Silva,
G. V. Soares,
C. Krug,
I. J. R. Baumvol
Publication year - 2012
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2012-01/17/768
Subject(s) - germanium , annealing (glass) , desorption , materials science , thermal desorption , thermal oxidation , thermal , germanium compounds , analytical chemistry (journal) , chemistry , optoelectronics , silicon , metallurgy , adsorption , physics , thermodynamics , environmental chemistry
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