Open AccessOzone Assisted ALD of Doped ZnO as a Transparent Metal Oxide
Author(s) -
Hai Yuan,
Bing Luo,
Wayne L. Gladfelter,
Stephen Campbell
Publication year - 2012
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2012-01/16/735
Subject(s) - doping , materials science , metal , oxide , nanotechnology , optoelectronics , metallurgy
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