Switching Characteristics in Pt/TaON/TiN Films for Nonvolatile Memory Applications
Author(s) -
Min-Chen Chen,
TingChang Chang,
Yi-Chieh Chiu,
Shih-Cheng Chen,
Sheng-Yao Huang,
Simon M. Sze
Publication year - 2012
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2012-01/16/727
Subject(s) - tin , materials science , non volatile memory , optoelectronics , engineering physics , metallurgy , engineering
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