Open AccessChanges in SiO2/Si(100) Interface Structure Induced by Forming Gas Annealing
Author(s) -
Tomoyuki Suwa,
Yuki Kumagai,
Akinobu Teramoto,
Takayuki Muro,
T. Kinoshita,
Shigetoshi Sugawa,
Takeo Hattori,
Tadahiro Ohmi
Publication year - 2012
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2012-01/16/712
Subject(s) - annealing (glass) , forming gas , materials science , interface (matter) , composite material , capillary action , capillary number
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