Open AccessAtomic-layer-deposited High-k/SiC Integration
Author(s) -
Peide D. Ye
Publication year - 2011
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2011-02/33/2201
Subject(s) - layer (electronics) , materials science , engineering physics , nanotechnology , physics
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